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7. A p-type (boron) diffusion is performed as follows: Pre-dep: 30 minutes, 850°C, solid solubility Drive-in: 60 minutes, 1100°C (a) What is the deposited Q? (2 marks) (b) If the substrate is doped 1 × 10^16cm^-3 phosphorus, what is the junction depth, xj. (2 marks) (c) What is the sheet resistance of the diffused layer? (2 marks)
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